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Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Design and characteristics of non-contact (phase shifting interferometry) instruments
Translate name
STANDARD published on 1.8.2025
Designation standards: ČSN EN ISO 25178-603
Classification mark: 014451
Catalog number: 521667
Publication date standards: 1.8.2025
SKU: NS-1227592
The number of pages: 32
Approximate weight : 96 g (0.21 lbs)
Country: Czech technical standard
Category: Technical standards ČSN
This document specifies the design and metrological characteristics of phase shifting interferometry (PSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements
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Latest update: 2025-08-29 (Number of items: 2 213 600)
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