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Testing of materials for semiconductor technology; determination of impurities in carrier gases and doping gases; determination of water impurity in hydrogen, oxygen, nitrogen, argon and helium by using a diphosphorus pentoxide cell.
STANDARD published on 1.8.1987
Designation standards: DIN 50450-1:1987-08
Note: WITHDRAWN
Publication date standards: 1.8.1987
SKU: NS-203846
The number of pages: 2
Approximate weight : 6 g (0.01 lbs)
Country: German technical standard
Category: Technical standards DIN
Prüfung von Materialien für die Halbleitertechnologie; Bestimmung von Verunreinigungen in Träger- und Dotiergasen; Bestimmung der Wasserverunreinigung in Wasserstoff, Sauerstoff, Stickstoff, Argon und Helium mittels einer Diphosphorpentoxidzelle.
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