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Standard DIN EN 60204-33:2011-11 1.11.2011 preview

DIN EN 60204-33:2011-11

VDE 0113-33. Safety of machinery - Electrical equipment of machines - Part 33: Requirements for semiconductor fabrication equipment.



STANDARD published on 1.11.2011


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The information about the standard:

Designation standards: DIN EN 60204-33:2011-11
Publication date standards: 1.11.2011
SKU: NS-593704
The number of pages: 133
Approximate weight : 430 g (0.95 lbs)
Country: German technical standard
Category: Technical standards DIN

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The category - similar standards:

Safety of machinerySemiconductor devices in general

Annotation of standard text DIN EN 60204-33:2011-11 :

VDE 0113-33. Sicherheit von Maschinen - Elektrische Ausrüstungen von Maschinen - Teil 33: Anforderungen an Fertigungseinrichtungen für Halbleiter.

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