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Testing of materials for semiconductor technology; determination of impurities in carrier gases and doping gases; determination of oxygen impurity in N2, Ar, He, Ne and H2 by using a galvanic cell.
STANDARD published on 1.12.1989
Designation standards: E DIN 50450-2:1989-12
Note: WITHDRAWN
Publication date standards: 1.12.1989
SKU: NS-267444
The number of pages: 4
Approximate weight : 12 g (0.03 lbs)
Country: German technical standard (Draft)
Category: Technical standards DIN
Prüfung von Materialien für die Halbleitertechnologie; Bestimmung von Verunreinigungen in Träger- und Dotiergasen; Bestimmung der Sauerstoffverunreinigung in Stickstoff, Argon, Helium, Neon und Wasserstoff mittels einer galvanischen Meßzelle.
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