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Testing of materials for semiconductor technology - Determination of traces of elements in liquids - Part 6: Determination of 36 elements in a high-purity ammonium fluoride solution (NH4; F) and in etching mixtures of high-purity ammonium fluoride solution containing hydrofluoric acid.
STANDARD published on 1.11.2012
Designation standards: E DIN 50451-6:2012-11
Note: WITHDRAWN
Publication date standards: 1.11.2012
SKU: NS-267461
The number of pages: 13
Approximate weight : 39 g (0.09 lbs)
Country: German technical standard (Draft)
Category: Technical standards DIN
Prüfung von Materialien für die Halbleitertechnologie - Bestimmung von Elementspuren in Flüssigkeiten - Teil 6: Bestimmung von 36 Elementen in hochreiner Ammoniumfluorid-Lösung (NH4; F) und Ätzmischungen aus hochreiner Ammoniumfluorid-Lösung mit Flusssäure.
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