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Semiconductor devices - Micro-electromechanical devices - Part 14: Forming limit measuring method of metallic film materials.
STANDARD published on 1.10.2010
Designation standards: E DIN EN 62047-14:2010-10
Note: WITHDRAWN
Publication date standards: 1.10.2010
SKU: NS-292589
The number of pages: 29
Approximate weight : 87 g (0.19 lbs)
Country: German technical standard (Draft)
Category: Technical standards DIN
Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 14: Verfahren zur Ermittlung der Grenzformänderung metallischer Dünnschichtwerkstoffe.
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