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WITHDRAWN E DIN EN 62047-17:2011-06 1.6.2011 preview

E DIN EN 62047-17:2011-06 (Draft)

Semiconductor devices - Micro- electromechanical devices - Part 17: Bulge test method for measuring mechanical properties of thin film.



STANDARD published on 1.6.2011


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The information about the standard:

Designation standards: E DIN EN 62047-17:2011-06
Note: WITHDRAWN
Publication date standards: 1.6.2011
SKU: NS-292592
The number of pages: 45
Approximate weight : 135 g (0.30 lbs)
Country: German technical standard (Draft)
Category: Technical standards DIN

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Annotation of standard text E DIN EN 62047-17:2011-06 :

Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 17: Wölbungs-Prüfverfahren zur Bestimmung mechanischer Eigenschaften dünner Schichten.

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