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Semiconductor devices - Micro-electromechanical devices - Part 29: Electromechanical relaxation test method for freestanding conductive thin-films under room temperature.
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STANDARD published on 1.8.2016
Designation standards: E DIN EN 62047-29:2016-08
Note: WITHDRAWN
Publication date standards: 1.8.2016
SKU: NS-643057
The number of pages: 19
Approximate weight : 57 g (0.13 lbs)
Country: German technical standard (Draft)
Category: Technical standards DIN
Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 29: Elektromechanisches Relaxations-Prüfverfahren für freistehende elektrisch leitende Dünnschichten bei Raumtemperatur.
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