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WITHDRAWN E DIN EN 62047-30:2016-08 1.8.2016 preview

E DIN EN 62047-30:2016-08 (Draft)

Semiconductor devices - Micro-electromechanical devices - Part 30: Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film.

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STANDARD published on 1.8.2016


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The information about the standard:

Designation standards: E DIN EN 62047-30:2016-08
Note: WITHDRAWN
Publication date standards: 1.8.2016
SKU: NS-643058
The number of pages: 34
Approximate weight : 102 g (0.22 lbs)
Country: German technical standard (Draft)
Category: Technical standards DIN

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Annotation of standard text E DIN EN 62047-30:2016-08 :

Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 30: Messverfahren für Kenngrößen der elektromechanischen Energiewandlung bei piezoelektrischen MEMS-Dünnschichten.

Latest update: 2025-07-07 (Number of items: 2 207 474)
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