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Specification for metrology pattern cells for integrated circuit manufacture
Translate name
STANDARD published on 20.6.1997
Designation standards: GB/T 16878-1997
Publication date standards: 20.6.1997
SKU: NS-868950
Country: Chinese technical standard
Category: Technical standards GB
Latest update: 2026-09-24 (Number of items: 2 302 501)
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