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  4. Standard "GB/T 17866-1999"
Standard GB/T 17866-1999 13.9.1999 preview

GB/T 17866-1999

Guideline for programmed defect masks and benchmark procedures for sensitivity analysisof mask defect inspection systems

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STANDARD published on 13.9.1999


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Price418.80 USD excl. VAT
418.80 USD

The information about the standard:

Designation standards: GB/T 17866-1999
Publication date standards: 13.9.1999
SKU: NS-870589
Country: Chinese technical standard
Category: Technical standards GB

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Integrated circuits. Microelectronics

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