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Test method for measuring surface metal contamination on semiconductor wafers —Total reflection X-Ray fluorescence spectroscopy
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STANDARD published on 24.7.2024
Designation standards: GB/T 24578-2024
Publication date standards: 24.7.2024
SKU: NS-1201448
Country: Chinese technical standard
Category: Technical standards GB
Latest update: 2026-09-14 (Number of items: 2 300 654)
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