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Trichlorosilane for silicon epitaxy - Determination of boronaluminiumphosphorusvanadiumchromemanganeseironcobaltnickelcoppermolybdenumarsenic and antimony content - Inductively coupled plasma mass spectrometric method
Automatically translated name:
Trichlorosilane for silicon epitaxy - Determination of boron,?luminium,phosphorus,vanadium,chrome,manganese,?ron,cobalt,nickel,copper,molybdenum,?rsenic and antimony content - Inductively coupled plasma mass spectrometric method
STANDARD published on 31.12.2012
Designation standards: GB/T 29056-2012
Note: WITHDRAWN
Publication date standards: 31.12.2012
SKU: NS-364825
Country: Chinese technical standard
Category: Technical standards GB
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