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Specifications of metrology patterns for the evaluation of advanced photolithgraphy
STANDARD published on 12.11.2013
Designation standards: GB/T 29844-2013
Publication date standards: 12.11.2013
SKU: NS-365658
Country: Chinese technical standard
Category: Technical standards GB
Latest update: 2026-07-09 (Number of items: 2 286 317)
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