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Standard IEC 62047-49-ed.1.0 25.11.2025 preview

IEC 62047-49-ed.1.0

Semiconductor devices - Micro-electromechanical devices - Part 49: Temperature and humidity test methods for piezoelectric MEMS cantilevers

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STANDARD published on 25.11.2025


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The information about the standard:

Designation standards: IEC 62047-49-ed.1.0
Publication date standards: 25.11.2025
SKU: NS-1249233
The number of pages: 8
Approximate weight : 24 g (0.05 lbs)
Country: International technical standard
Category: Technical standards IEC

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Other semiconductor devices

Annotation of standard text IEC 62047-49-ed.1.0 :

IEC 62047-49:2025 specifies reliability test methods of electro-mechanical conversion characteristics of piezoelectric thin film on microcantilever, which is typical structure of micro sensors and micro actuators. In order to estimate the stability of the piezoelectric coefficient of the piezoelectric thin films with microscale structures in the operating conditions, this document reports the schema to determine the characteristic parameters for consumer, industry or any other applications of piezoelectric MEMS devices. This document applies to piezoelectric thin films on microcantilever fabricated by MEMS process.

Latest update: 2025-12-01 (Number of items: 2 249 634)
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