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ISO 14237:2010-ed.2.0
Surface chemical analysis — Secondary-ion mass spectrometry — Determination of boron atomic concentration in silicon using uniformly doped materials
Automatically translated name:
Surface chemical analysis -- Secondary-ion mass spectrometry -- Determination of boron atomic concentration in silicon using uniformly doped materials
STANDARD published on 9.7.2010
The information about the standard:
Designation standards: ISO 14237:2010-ed.2.0
Publication date standards: 9.7.2010
SKU: NS-425290
The number of pages: 19
Approximate weight : 57 g (0.13 lbs)
Country: International technical standard
Category: Technical standards ISO
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