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ISO 14606:2022-ed.3.0
Surface chemical analysis — Sputter depth profiling — Optimization using layered systems as reference materials
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STANDARD published on 21.11.2022
The information about the standard:
Designation standards: ISO 14606:2022-ed.3.0
Publication date standards: 21.11.2022
SKU: NS-1096612
The number of pages: 17
Approximate weight : 51 g (0.11 lbs)
Country: International technical standard
Category: Technical standards ISO
The category - similar standards:
Annotation of standard text ISO 14606:2022-ed.3.0 :
Description / Abstract: This document gives guidance and requirements on the optimization of sputter-depth profiling parameters using appropriate single-layered and multilayered reference materials, in order to achieve optimum depth resolution as a function of instrument settings in Auger electron spectroscopy, X-ray photoelectron spectroscopy and secondary ion mass spectrometry. This document is not intended to cover the use of special multilayered systems such as delta doped layers.
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