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Atomic layer deposition — Chemical characteristics and related process specifications of atomic layer deposition precursors
Translate name
STANDARD published on 1.6.2026
Designation standards: ISO 19383:2026
Publication date standards: 1.6.2026
SKU: NS-1271449
The number of pages: 13
Approximate weight : 39 g (0.09 lbs)
Country: International technical standard
Category: Technical standards ISO
Description / Abstract: This document defines the chemical characteristics and related process specifications of atomic layer deposition precursors, including assay content, metal purity and anion content specification.
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Latest update: 2026-06-05 (Number of items: 2 281 463)
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