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Physical vapor deposition coatings — Magnetron sputtering deposition of TiAlSiN thin films — Specification
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STANDARD published on 3.8.2026
Designation standards: ISO 25164:2026
Publication date standards: 3.8.2026
SKU: NS-1278772
The number of pages: 6
Approximate weight : 18 g (0.04 lbs)
Country: International technical standard
Category: Technical standards ISO
Description / Abstract: This document specifies the technical requirements for TiAlSiN thin films deposited by magnetron sputtering. This document is also applicable to the deposition of TiN, TiAlN or TiSiN thin films.
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Latest update: 2026-08-06 (Number of items: 2 291 512)
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