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ISO/TS 21383:2021
Microbeam analysis — Scanning electron microscopy — Qualification of the scanning electron microscope for quantitative measurements
Translate name
STANDARD published on 12.3.2021
The information about the standard:
Designation standards: ISO/TS 21383:2021
Publication date standards: 12.3.2021
SKU: NS-1020039
The number of pages: 59
Approximate weight : 177 g (0.39 lbs)
Country: International technical standard
Category: Technical standards ISO
The category - similar standards:
Annotation of standard text ISO/TS 21383:2021 :
Description / Abstract: This document describes methods to qualify the scanning electron microscope with the digital imaging system for quantitative and qualitative SEM measurements by evaluating essential scanning electron microscope performance parameters to maintain the performance after installation of the instruments. The items and evaluating methods of the performance parameters are selected by users for their own purposes.
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