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Semiconductor devices -- Micro-electromechanical devices -- Part 30: Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film
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STANDARD published on 23.3.2020
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Designation standards: JIS C5630-30:2020
Publication date standards: 23.3.2020
SKU: NS-1075561
The number of pages: 16
Approximate weight : 48 g (0.11 lbs)
Country: Japanese technical standard
Category: Technical standards JIS
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