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Methods of measurement of thickness, thickness variation and bow for silicon wafer
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STANDARD published on 28.2.1994
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Designation standards: JIS H0611:1994
Publication date standards: 28.2.1994
SKU: NS-1078241
The number of pages: 6
Approximate weight : 18 g (0.04 lbs)
Country: Japanese technical standard
Category: Technical standards JIS
Semiconducting materialsOther non-ferrous metals and their alloys
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