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Surface chemical analysis-Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy
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STANDARD published on 20.1.2026
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Designation standards: JIS K0148:2026
Publication date standards: 20.1.2026
SKU: NS-1261785
The number of pages: 28
Approximate weight : 84 g (0.19 lbs)
Country: Japanese technical standard
Category: Technical standards JIS
Latest update: 2026-03-03 (Number of items: 2 264 974)
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