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Standard ÖNORM EN ISO 23131 15.2.2023 preview

ÖNORM EN ISO 23131

Ellipsometry - Principles (ISO 23131:2021)

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STANDARD published on 15.2.2023


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The information about the standard:

Designation standards: ÖNORM EN ISO 23131
Publication date standards: 15.2.2023
SKU: NS-1103458
The number of pages: 22
Approximate weight : 66 g (0.15 lbs)
Country: Austrian technische Norm
Category: Technical standards ÖNORM

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The category - similar standards:

Metrology and measurement in general

Annotation of standard text ÖNORM EN ISO 23131 :

Dieses Dokument legt ein Verfahren zur Bestimmung optischer und dielektrischer Konstanten im UV-VIS-NIR-Spektralbereich sowie von Schichtdicken im Bereich der at-line-Fertigungskontrolle, der Qualitätssicherung und der Materialentwicklung durch akkreditierte Prüflaboratorien fest. Es ist anwendbar für stand-alone-Messsysteme. Die Darstellung der Ergebnisunsicherheit entspricht dem ISO/IEC Guide 98-3.

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Latest update: 2026-06-22 (Number of items: 2 284 351)
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