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  4. Standard "UNE-EN 62047-16:2015"
Standard UNE-EN 62047-16:2015 1.8.2015 preview

UNE-EN 62047-16:2015

Semiconductor devices - Micro-electromechanical devices - Part 16: Test methods for determining residual stresses of MEMS films – Wafer curvature and cantilever beam deflection methods (Endorsed by AENOR in August of 2015.)

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STANDARD published on 1.8.2015


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The information about the standard:

Designation standards: UNE-EN 62047-16:2015
Publication date standards: 1.8.2015
SKU: NS-1120543
The number of pages: 15
Approximate weight : 45 g (0.10 lbs)
Country: Spanish technical standard
Category: Technical standards UNE

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