Cleanrooms and associated controlled environments - Part 2: Specifications for testing and monitoring to prove continued compliance with ISO 14644-1

WITHDRAWN published on 1.6.2001

Cleanrooms and associated controlled environments - Part 3: Test methods

WITHDRAWN published on 1.6.2006

Cleanrooms and associated controlled environments - Part 4: Design, construction and start-up

WITHDRAWN published on 1.12.2001

Cleanrooms and associated controlled environments - Part 5: Operations

WITHDRAWN published on 1.2.2005

Cleanrooms and associated controlled environments - Part 8: Classification of airborne molecular contamination

WITHDRAWN published on 1.2.2007

Cleanrooms and associated controlled environments - Part 8: Classification of air cleanliness by chemical concentration (ACC)

WITHDRAWN published on 1.7.2013

Cleanrooms and associated controlled environments - Part 9: Classification of surface cleanliness by particle concentration

WITHDRAWN published on 1.2.2013

Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration

WITHDRAWN published on 1.7.2013

Cleanrooms and associated controlled environments - Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications

WITHDRAWN published on 1.10.2018

Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration

WITHDRAWN published on 1.4.2017