Cleanrooms and associated controlled environments - Part 9: Assessment of surface cleanliness for particle concentration

Standard published on 1.11.2022

Cleanrooms and associated controlled environments - Part 10: Assessment of surface cleanliness for chemical contamination

Standard published on 1.11.2022

Cleanrooms and associated controlled environments - Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical concentration

Standard published on 1.8.2026

Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration

Standard published on 1.8.2026

Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration

Standard published on 1.6.2018

Cleanrooms and associated controlled environments - Part 16: Energy efficiency in cleanrooms and separative devices

Standard published on 1.1.2020

Cleanrooms and associated controlled environments - Part 17: Particle deposition rate applications

Standard published on 1.10.2021

Cleanrooms and associated controlled environments - Part 18: Assessment of suitability of consumables

Standard published on 1.3.2024

Cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness (ISO 14644-1:1999)

WITHDRAWN published on 1.11.2000

Cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness by particle concentration

WITHDRAWN published on 1.6.2016