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DIN 51456:2013-10
Testing of materials for semiconductor technology - Surface analysis of silicon wafers by multielement determination in aqueous analysis solutions using mass spectrometry with inductively coupled plasma (ICP-MS).
STANDARD published on 1.10.2013
The information about the standard:
Designation standards: DIN 51456:2013-10
Publication date standards: 1.10.2013
SKU: NS-204698
The number of pages: 15
Approximate weight : 45 g (0.10 lbs)
Country: German technical standard
Category: Technical standards DIN
The category - similar standards:
Annotation of standard text DIN 51456:2013-10 :
Prüfung von Materialien für die Halbleitertechnologie - Oberflächenanalyse von Silicium-Halbleiterscheiben (Wafer) durch Multielementbestimmung in wässrigen Analysenlösungen mittels Massenspektrometrie mit induktiv gekoppeltem Plasma (ICP-MS).
Similar standards:
WITHDRAWN
1.11.2009
1.9.1994
1.10.2002
1.6.2003
1.10.2001
1.1.2000
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