Standard DIN EN 62047-16:2015-12 1.12.2015 preview

DIN EN 62047-16:2015-12

Semiconductor devices - Micro-electromechanical devices - Part 16: Test methods for determining residual stresses of MEMS films - Wafer curvature and cantilever beam deflection methods.



STANDARD published on 1.12.2015


Language
Format
AvailabilityIN STOCK
Price84.50 USD excl. VAT
84.50 USD

The information about the standard:

Designation standards: DIN EN 62047-16:2015-12
Publication date standards: 1.12.2015
SKU: NS-620810
The number of pages: 13
Approximate weight : 39 g (0.09 lbs)
Country: German technical standard
Category: Technical standards DIN

Annotation of standard text DIN EN 62047-16:2015-12 :

Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 16: Messverfahren zur Ermittlung der Eigenspannungen in Dünnschichten von MEMS-Bauteilen - Substratkrümmungs- und Biegebalken-Verfahren.

We recommend:

Technical standards updating

Do you want to make sure you use only the valid technical standards?
We can offer you a solution which will provide you a monthly overview concerning the updating of standards which you use.

Would you like to know more? Look at this page.


This website uses cookie files. By browsing this website you expresses your consent with using cookies. More information / I understand