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Standard DIN EN 62047-17:2015-12 1.12.2015 preview

DIN EN 62047-17:2015-12

Semiconductor devices - Micro-electromechanical devices - Part 17: Bulge test method for measuring mechanical properties of thin films.



STANDARD published on 1.12.2015


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126.30 USD

The information about the standard:

Designation standards: DIN EN 62047-17:2015-12
Publication date standards: 1.12.2015
SKU: NS-620811
The number of pages: 28
Approximate weight : 84 g (0.19 lbs)
Country: German technical standard
Category: Technical standards DIN

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The category - similar standards:

Semiconductor devices in generalElectromechanical components in general

Annotation of standard text DIN EN 62047-17:2015-12 :

Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 17: Wölbungs-Prüfverfahren zur Bestimmung mechanischer Eigenschaften dünner Schichten.

Latest update: 2025-10-17 (Number of items: 2 238 986)
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