Standard DIN EN 62047-26:2016-12 1.12.2016 preview

DIN EN 62047-26:2016-12

Semiconductor devices - Micro-electromechanical devices - Part 26: Description and measurement methods for micro trench and needle structures.

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STANDARD published on 1.12.2016


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The information about the standard:

Designation standards: DIN EN 62047-26:2016-12
Publication date standards: 1.12.2016
SKU: NS-667766
The number of pages: 29
Approximate weight : 87 g (0.19 lbs)
Country: German technical standard
Category: Technical standards DIN

Annotation of standard text DIN EN 62047-26:2016-12 :

Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 26: Beschreibung und Messverfahren für Mikro-Rillen und Nadelstrukturen.

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