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Corrigendum 1 - Semiconductor devices - Micro-electromechanical devices - Part 10: Micro-pillar compression test for MEMS materials
STANDARD published on 28.2.2012
Designation standards: IEC 62047-10-ed.1.0/Cor.1
Note: Correction
Publication date standards: 28.2.2012
SKU: NS-414097
Approximate weight : 300 g (0.66 lbs)
Country: International technical standard
Category: Technical standards IEC
Semiconductor devices - Micro-electromechanical devices - Part 10: Micro-pillar compression test for MEMS materials
(Dispositifs a semiconducteur - Dispositifs microelectromecaniques - Partie 10: Essai de compression utilisant la technique des micro-piliers pour les materiaux des MEMS)
Standard published on 26.7.2011
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