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STN EN 62047-12 (358792)
Polovodičové súčiastky. Elektromechanické mikrosúčiastky. Časť 12: Skúšobné metódy tenkovrstvových materiálov na namáhanie ohýbaním s využitím rezonančnej vibrácie štruktúr MEMS (Norma na priame používanie ako STN).
Automatically translated name:
Semiconductor devices. Electromechanical micro devices. Part 12: Test methods of thin film materials for bending stress using resonant vibration of MEMS structures (IEC STN).
STANDARD published on 1.3.2012
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The information about the standard:
Designation standards: STN EN 62047-12
Classification mark: 358792
Catalog number: 114772
Publication date standards: 1.3.2012
SKU: NS-531592
Approximate weight : 36 g (0.08 lbs)
Country: Slovak technical standard
Category: Technical standards STN
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