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Semiconductor devices - Micro-electromechanical devices - Part 17: Bulge test method for measuring mechanical properties of thin films
Automatically translated name:
Semiconductor devices. Electromechanical micro devices. Part 17 : Measurement of mechanical properties of thin layers of bulging test method (IEC STN ).
STANDARD published on 1.12.2015
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Designation standards: STN EN 62047-17
Classification mark: 358792
Catalog number: 121889
Publication date standards: 1.12.2015
SKU: NS-621880
Approximate weight : 51 g (0.11 lbs)
Country: Slovak technical standard
Category: Technical standards STN
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