Semiconductor devices - Micro-electromechanical devices - Part 4: Generic specification for MEMS

Standard published on 7.1.2026

Semiconductor devices - Micro-electromechanical devices - Part 4: Generic specification for MEMS

Standard published on 7.1.2026

Semiconductor devices - Micro-electromechanical devices - Part 40:Test methods of micro-electromechanical inertial shock switch threshold

Standard published on 3.9.2021

Semiconductor devices - Micro-electromechanical devices - Part 41: RF MEMS circulators and isolators
(Dispositifs a semiconducteurs - Dispositifs microelectromecaniques - Partie 41: Circulateurs et isolateurs a MEMS RF)

Standard published on 15.6.2021

Semiconductor devices - Micro-electromechanical devices - Part 42: Measurement methods of electro-mechanical conversion characteristics of piezoelectric MEMS cantilever

Standard published on 16.9.2022

Semiconductor devices - Micro-electromechanical devices - Part 43: Test method of electrical characteristics after cyclic bending deformation for flexible micro-electromechanical devices

Standard published on 19.3.2024

Semiconductor devices - Micro-electromechanical devices - Part 44: Test methods for dynamic performances of MEMS resonant electric-field-sensitive devices

Standard published on 22.2.2024

Semiconductor devices - Micro-electromechanical devices - Part 45: Silicon based MEMS fabrication technology - Measurement method of impact resistance of nanostructures

Standard published on 20.3.2025

Semiconductor devices - Micro-electromechanical devices - Part 46: Silicon based MEMS fabrication technology - Measurement method of tensile strength of nanoscale thickness membrane

Standard published on 23.4.2025

Semiconductor devices - Micro-electromechanical devices - Part 47: Silicon based MEMS fabrication technology - Measurement method of bending strength of microstructures

Standard published on 23.8.2024