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Preview IEC 62047-41-ed.1.0 15.6.2021
IEC 62047-41-ed.1.0

Semiconductor devices - Micro-electromechanical devices - Part 41: RF MEMS circulators and isolators
(Dispositifs a semiconducteurs - Dispositifs microelectromecaniques - Partie 41: Circulateurs et isolateurs a MEMS RF)

Standard published on 15.6.2021

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electronic design (pdf) (388.80 USD)


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Preview IEC 62047-42-ed.1.0 16.9.2022
IEC 62047-42-ed.1.0

Semiconductor devices - Micro-electromechanical devices - Part 42: Measurement methods of electro-mechanical conversion characteristics of piezoelectric MEMS cantilever

Standard published on 16.9.2022

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electronic design (pdf) (239.20 USD)


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Preview IEC 62047-43-ed.1.0 19.3.2024
IEC 62047-43-ed.1.0

Semiconductor devices - Micro-electromechanical devices - Part 43: Test method of electrical characteristics after cyclic bending deformation for flexible micro-electromechanical devices

Standard published on 19.3.2024

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electronic design (pdf) (171.90 USD)


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Preview IEC 62047-44-ed.1.0 22.2.2024
IEC 62047-44-ed.1.0

Semiconductor devices - Micro-electromechanical devices - Part 44: Test methods for dynamic performances of MEMS resonant electric-field-sensitive devices

Standard published on 22.2.2024

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electronic design (pdf) (171.90 USD)


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Preview IEC 62047-45-ed.1.0 20.3.2025
IEC 62047-45-ed.1.0

Semiconductor devices - Micro-electromechanical devices - Part 45: Silicon based MEMS fabrication technology - Measurement method of impact resistance of nanostructures

Standard published on 20.3.2025

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electronic design (pdf) (119.60 USD)


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Preview IEC 62047-46-ed.1.0 23.4.2025
IEC 62047-46-ed.1.0

Semiconductor devices - Micro-electromechanical devices - Part 46: Silicon based MEMS fabrication technology - Measurement method of tensile strength of nanoscale thickness membrane

Standard published on 23.4.2025

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electronic design (pdf) (119.60 USD)


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Preview IEC 62047-47-ed.1.0 23.8.2024
IEC 62047-47-ed.1.0

Semiconductor devices - Micro-electromechanical devices - Part 47: Silicon based MEMS fabrication technology - Measurement method of bending strength of microstructures

Standard published on 23.8.2024

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electronic design (pdf) (119.60 USD)


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Preview IEC 62047-48-ed.1.0 7.6.2024
IEC 62047-48-ed.1.0

Semiconductor devices - Micro-electromechanical devices - Part 48: Test method for determining solution concentration by optical absorption using MEMS fluidic device

Standard published on 7.6.2024

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Preview IEC 62047-49-ed.1.0 25.11.2025
IEC 62047-49-ed.1.0

Semiconductor devices - Micro-electromechanical devices - Part 49: Temperature and humidity test methods for piezoelectric MEMS cantilevers

Standard published on 25.11.2025

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Preview IEC 62047-5-ed.1.0 13.7.2011
IEC 62047-5-ed.1.0

Semiconductor devices - Micro-electromechanical devices - Part 5: RF MEMS switches
(Dispositifs a semiconducteurs - Dispositifs microelectromecaniques - Partie 5: Commutateurs MEMS-RF)

Standard published on 13.7.2011

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electronic design (pdf) (388.80 USD)


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