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JIS covers industrial and mineral products, comparable to standards established by various industrial associations for specific needs, or standards established and used by companies (operation manuals, products specifications etc.). The need for common practices in companies of the same industrial sector leads to the establishment of industrial association standards, and the same need in terms of wider applications promotes the establishment of JIS.
Semiconductor devices -- Micro-electromechanical devices -- Part 1: Terms and definitions
Standard published on 21.3.2017
Selected format:Semiconductor devices -- Micro-electromechanical devices -- Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures
Standard published on 20.2.2014
Selected format:Semiconductor devices -- Micro-electromechanical devices -- Part 13: Bend-and shear-type test methods of measuring adhesive strength for MEMS structures
Standard published on 20.2.2014
Selected format:Semiconductor devices -- Micro-electromechanical devices -- Part 18: Bend testing methods of thin film materials
Standard published on 22.12.2014
Selected format:Semiconductor devices -- Micro-electromechanical devices -- Part 19: Electronic compasses
Standard published on 22.12.2014
Selected format:Semiconductor devices -- Micro-electromechanical devices-- Part 2: Tensile testing method of thin film materials
Standard published on 20.3.2009
Selected format:Semiconductor devices -- Micro-electromechanical devices -- Part 20: Gyroscopes
Standard published on 20.11.2015
Selected format:Semiconductor devices -- Micro-electromechanical devices -- Part 26: Description and measurement methods for micro trench and needle structures
Standard published on 20.10.2017
Selected format:Semiconductor devices -- Micro-electromechanical devices -- Part 28: Performance testing method of vibration-driven MEMS electret energy harvesting devices
Standard published on 23.3.2020
Selected format:Semiconductor devices -- Micro-electromechanical devices-- Part 3: Thin film standard test piece for tensile testing
Standard published on 20.3.2009
Selected format:Latest update: 2026-06-12 (Number of items: 2 281 969)
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