We need your consent to use the individual data so that you can see information about your interests, among other things. Click "OK" to give your consent.
Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems.
STANDARD published on 1.4.2014
Designation standards: DIN EN 62047-11:2014-04
Publication date standards: 1.4.2014
SKU: NS-239562
The number of pages: 21
Approximate weight : 63 g (0.14 lbs)
Country: German technical standard
Category: Technical standards DIN
Semiconductor devices in generalElectromechanical components in general
Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 11: Prüfverfahren für lineare thermische Ausdehnungskoeffizienten für freistehende Werkstoffe der Mikrosystemtechnik.
WITHDRAWN
1.4.2003
1.2.2012
1.12.2003
WITHDRAWN
1.4.2003
WITHDRAWN
1.10.2006
WITHDRAWN
1.5.2014
Latest update: 2025-06-17 (Number of items: 2 204 825)
© Copyright 2025 NORMSERVIS s.r.o.