Standard DIN EN 62047-12:2012-06 1.6.2012 preview

DIN EN 62047-12:2012-06

Semiconductor devices - Micro-electromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures.



STANDARD published on 1.6.2012


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The information about the standard:

Designation standards: DIN EN 62047-12:2012-06
Publication date standards: 1.6.2012
SKU: NS-239563
The number of pages: 31
Approximate weight : 93 g (0.21 lbs)
Country: German technical standard
Category: Technical standards DIN

Annotation of standard text DIN EN 62047-12:2012-06 :

Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 12: Verfahren zur Prüfung der Biege-Ermüdungsfestigkeit von Dünnschichtwerkstoffen unter Verwendung der Resonanzschwingungen bei MEMS-Strukturen.

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