ČSN EN 62047-21 (358775)

Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson´s ratio of thin film MEMS materials

Automatically translated name:

Semiconductor devices - Microelectromechanical devices - Part 21: Test method for Poisson's ratio of thin film materials, MEMS. ( In English , the text is part of a copy ).



STANDARD published on 1.4.2015


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The information about the standard:

Designation standards: ČSN EN 62047-21
Classification mark: 358775
Catalog number: 97102
Publication date standards: 1.4.2015
SKU: NS-583615
The number of pages: 24
Approximate weight : 72 g (0.16 lbs)
Country: Czech technical standard
Category: Technical standards ČSN

Annotation of standard text ČSN EN 62047-21 (358775):

Tato norma definuje stanovení Poissonova poměru z výsledků měření, které jsou získány pomocí zatěžování tenkovrstvých mikroelektromechanických systémů (MEMS) v jedné, nebo dvou osách. Jedná se o vzorky, které mají délku a šířku menší jak 10 mm a tloušťku menší jak 10 _m

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