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Semiconductor devices - Micro-electromechanical devices - Part 14: Forming limit measuring method of metallic film materials.
STANDARD published on 1.10.2012
Designation standards: DIN EN 62047-14:2012-10
Publication date standards: 1.10.2012
SKU: NS-239565
The number of pages: 20
Approximate weight : 60 g (0.13 lbs)
Country: German technical standard
Category: Technical standards DIN
Semiconductor devices in generalElectromechanical components in general
Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 14: Verfahren zur Ermittlung der Grenzformänderung metallischer Dünnschichtwerkstoffe.
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