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Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson´s ratio of thin film MEMS materials.
STANDARD published on 1.4.2015
Designation standards: DIN EN 62047-21:2015-04
Publication date standards: 1.4.2015
SKU: NS-583027
The number of pages: 16
Approximate weight : 48 g (0.11 lbs)
Country: German technical standard
Category: Technical standards DIN
Semiconductor devices in generalElectromechanical components in general
Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 21: Prüfverfahren zur Querkontraktionszahl von Dünnschichtwerkstoffen der Mikrosystemtechnik.
1.4.2014
1.2.2007
1.4.2015
1.4.2015
WITHDRAWN
1.5.2014
WITHDRAWN
1.5.2014
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